Present situation, problems and suggestions of advanced optical ultra-precision manufacturing technology

Authors

• Xin ZHANG, Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, ChinaFollow
• Kuo HAI, Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, ChinaFollow
• Zizheng LI, School of Physics and Astronomy, Sun Yat-sen University, Zhuhai 519082, China
• Yinghuai ZHANG, Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
• Binzhi ZHANG, Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
• Yunfei ZHANG, Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
• Zhongming ZANG, Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
• Peng ZENG, Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
• Mingtao WU, Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
• Kailong LI, Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
• Lisong YAN, School of Optics and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
• Taixi CEHN, Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
• Yigang QIAN, Zhongtian Technology Co. Ltd., Nantong 226009, China
• Hongfei JIAO, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

Keywords

optical elements; ultra-precision manufacturing; complex surface; full frequency band

Abstract

With the continuous development of key fields such as laser nuclear fusion, space-to-earth observation, deep space exploration, and extreme ultraviolet lithography, the demand for optical components with high surface shape accuracy and high surface quality is increasing. Advanced optical ultra-precision manufacturing technology has become the core pillar of the national high-end manufacturing field. In this paper, the research status of advanced optical ultra-precision manufacturing technology in China is described with the focus on material preparation technology of optical components, ultra-precision forming, polishing, testing and surface treatment technology of components. The existing problems and countermeasures in this field in China are analyzed. Finally, the new stage of advanced optical ultra-precision manufacturing technology is prospected, hoping to lead to some thinking in this field.

First page

870

Last Page

878

Language

Chinese

Publisher

Bulletin of Chinese Academy of Sciences

Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial-No Derivative Works 4.0 International License.

References

1 师途, 杨甬英, 张磊, 等. 非球面光学元件的面形检测技术，中国光学, 2014, 7(1): 26-46. Shi T, Yang Y Y, Zhang L, et al. Surface testing methods of aspheric optical elements. Chinese Optics, 2014, 7(1): 26-46. (in Chinese)

2 张学军. 空间光学系统先进制造技术进展——从非球面到自由曲面.光学学报, 2023, 43(8): 164-179. Zhang X J. Progress on space optics manufacturing: From aspheres to freeforms. Acta Optica Sinica, 2023, 43(8): 164-179. (in Chinese)

3 董家宁, 范杰, 王海珠, 等. 高反射光学薄膜激光损伤研究进展. 中国光学, 2018, 11(6): 931-948. Dong J N, Fan J, Wang H Z. Research progress in laser damage of high reflective optical thin films. Chinese Optics, 2018, 11(6): 931-948. (in Chinese)

4 蒙文, 张文杰, 李云霞, 等. 强激光辐照低慢小目标抖动光斑功率密度估计. 激光与红外, 2016, 46(11): 1329-1333. Meng W, Zhang W J, Li Y X, et al. Power density estimation of LSS-target spot jitter induced by intense laser irradiation. Laser & Infrared, 2016, 46(11): 1329-1333. (in Chinese)

5 程鑫彬, 焦宏飞, 张锦龙, 钮信尚等. 纳秒激光薄膜损伤机理和应用研究. 光学精密工程, 2022, 30(21): 2568-2590. Cheng X B, Jiao H F, Zhang J L, et al. Research on damage mechanism and application of nanosecond laser coatings. Optics and Precision Engineering, 2022, 30(21): 2568-2590. (in Chinese)

6 马彬, 侯志强, 焦宏飞, 等. 脉冲激光损伤阈值测量技术及光学元件损伤性能. 光学精密工程, 2022, 30(21): 2805-2826. Ma B, Hou Z Q, Jiao H F. Pulsed laser-induced damage threshold measurement and damage performance of optical components. Optics and Precision Engineering, 2022, 30(21): 2805-2826. (in Chinese)

Recommended Citation

ZHANG, Xin; HAI, Kuo; LI, Zizheng; ZHANG, Yinghuai; ZHANG, Binzhi; ZHANG, Yunfei; ZANG, Zhongming; ZENG, Peng; WU, Mingtao; LI, Kailong; YAN, Lisong; CEHN, Taixi; QIAN, Yigang; and JIAO, Hongfei (2024) "Present situation, problems and suggestions of advanced optical ultra-precision manufacturing technology," Bulletin of Chinese Academy of Sciences (Chinese Version): Vol. 40 : Iss. 5 , Article 13.
DOI: https://doi.org/10.3724/j.issn.1000-3045.20250502001
Available at: https://bulletinofcas.researchcommons.org/journal/vol40/iss5/13